In the semiconductor industry , the term high-κ dielectric refers to a material with a high dielectric constant (κ, kappa ), as compared to silicon dioxide . High-κ dielectrics are used in semiconductor manufacturing processes where they are usually used to replace a silicon dioxide gate dielectric or another dielectric layer of a device. The implementation of high-κ gate dielectrics is one of several strategies developed to allow further miniaturization of microelectronic components, colloquially referred to as extending Moore's Law .
31-711: (Redirected from Stacks ) [REDACTED] Look up Stack or stack in Wiktionary, the free dictionary. Stack may refer to: Places [ edit ] Stack Island , an island game reserve in Bass Strait, south-eastern Australia, in Tasmania’s Hunter Island Group Blue Stack Mountains , in Co. Donegal, Ireland People [ edit ] Stack (surname) (including
62-492: A 2005 album by Bernie Marsden Stacks, trailer parks that were made vertical, in the film Ready Player One Computing [ edit ] Stack (abstract data type) , abstract data type and data structure based on the principle of last in first out Stack (Haskell) , a tool to build Haskell projects and manage their dependencies Stack in Macintosh, one of a collection of documents created with HyperCard (as in
93-435: A 2005 album by Bernie Marsden Stacks, trailer parks that were made vertical, in the film Ready Player One Computing [ edit ] Stack (abstract data type) , abstract data type and data structure based on the principle of last in first out Stack (Haskell) , a tool to build Haskell projects and manage their dependencies Stack in Macintosh, one of a collection of documents created with HyperCard (as in
124-584: A conventionally formed silicon oxide dielectric is infused with a small amount of nitrogen. The nitride content subtly raises the dielectric constant and is thought to offer other advantages, such as resistance against dopant diffusion through the gate dielectric. In 2000, Gurtej Singh Sandhu and Trung T. Doan of Micron Technology initiated the development of atomic layer deposition high-κ films for DRAM memory devices. This helped drive cost-effective implementation of semiconductor memory , starting with 90-nm node DRAM. In early 2007, Intel announced
155-473: A free-flowing grade-separated junction between two roads The Stack , the interchange of I-10 and I-17 in Phoenix, Arizona Other uses [ edit ] Stack Ltd , the company that owns 0verflow Stack (unit) , a US unit of volume for stacked firewood Amp stack , of guitar amplifiers Library stack , compactly spaced bookshelves in libraries Smoke stack or chimney Flue-gas stack ,
186-418: A free-flowing grade-separated junction between two roads The Stack , the interchange of I-10 and I-17 in Phoenix, Arizona Other uses [ edit ] Stack Ltd , the company that owns 0verflow Stack (unit) , a US unit of volume for stacked firewood Amp stack , of guitar amplifiers Library stack , compactly spaced bookshelves in libraries Smoke stack or chimney Flue-gas stack ,
217-453: A group of software systems, increasing in abstraction from bottom to top Stack-based memory allocation , a memory allocation scheme based on the principle of "last in, first out" Stacks (Mac OS) , a folder view on the Dock of macOS Stacks blockchain , a Bitcoin smart contract platform Science and technology [ edit ] Stack (geology) , a large vertical column of rock in
248-402: A group of software systems, increasing in abstraction from bottom to top Stack-based memory allocation , a memory allocation scheme based on the principle of "last in, first out" Stacks (Mac OS) , a folder view on the Dock of macOS Stacks blockchain , a Bitcoin smart contract platform Science and technology [ edit ] Stack (geology) , a large vertical column of rock in
279-527: A high-κ material allows increased gate thickness thus decreasing gate capacitance without the associated leakage effects. The gate oxide in a MOSFET can be modeled as a parallel plate capacitor. Ignoring quantum mechanical and depletion effects from the Si substrate and gate, the capacitance C of this parallel plate capacitor is given by where Since leakage limitation constrains further reduction of t , an alternative method to increase gate capacitance
310-523: A list of people with the name) Parnell "Stacks" Edwards, a key associate in the Lufthansa heist Robert Stack Pierce (1933–2016), an American actor and baseball player Robert Stack (1919 – 2003), and American actor and television show host Brian "Stack" Stevens (1941–2017), a Cornish rugby player Arts, entertainment, and media [ edit ] Stack magazine , a bimonthly publication about high school sports Stacks (album) ,
341-467: A list of people with the name) Parnell "Stacks" Edwards, a key associate in the Lufthansa heist Robert Stack Pierce (1933–2016), an American actor and baseball player Robert Stack (1919 – 2003), and American actor and television show host Brian "Stack" Stevens (1941–2017), a Cornish rugby player Arts, entertainment, and media [ edit ] Stack magazine , a bimonthly publication about high school sports Stacks (album) ,
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#1732772754151372-557: A political and design theory of planetary-scale computation coined by Benjamin H. Bratton Stack, an assembled multistage rocket Stack (microelectronics), a two-layer gate insulator in MOSFET, usually high-κ -oxide over SiO 2 Transportation [ edit ] Operation Stack , parking lorries on the M20 in Kent, England, when Channel crossings are disrupted Stack interchange ,
403-404: A political and design theory of planetary-scale computation coined by Benjamin H. Bratton Stack, an assembled multistage rocket Stack (microelectronics), a two-layer gate insulator in MOSFET, usually high-κ -oxide over SiO 2 Transportation [ edit ] Operation Stack , parking lorries on the M20 in Kent, England, when Channel crossings are disrupted Stack interchange ,
434-413: A reduction in the channel length or an increase in the gate dielectric capacitance. Replacing the silicon dioxide gate dielectric with another material adds complexity to the manufacturing process. Silicon dioxide can be formed by oxidizing the underlying silicon, ensuring a uniform, conformal oxide and high interface quality. As a consequence, development efforts have focused on finding a material with
465-563: A requisitely high dielectric constant that can be easily integrated into a manufacturing process. Other key considerations include band alignment to silicon (which may alter leakage current), film morphology, thermal stability, maintenance of a high mobility of charge carriers in the channel and minimization of electrical defects in the film/interface. Materials which have received considerable attention are hafnium silicate , zirconium silicate , hafnium dioxide and zirconium dioxide , typically deposited using atomic layer deposition . It
496-502: A stack of virtual cards) Stack in LiveCode , one of a collection of program scripts created with LiveCode's Transcript programming language Call stack , stack data structure that stores information about the active subroutines of a computer program Stack machine , an architecture centered around a pushdown stack Protocol stack , a particular software implementation of a computer networking protocol suite Solution stack ,
527-447: A stack of virtual cards) Stack in LiveCode , one of a collection of program scripts created with LiveCode's Transcript programming language Call stack , stack data structure that stores information about the active subroutines of a computer program Stack machine , an architecture centered around a pushdown stack Protocol stack , a particular software implementation of a computer networking protocol suite Solution stack ,
558-541: A too large V G would create an undesirable, high electric field across the oxide. Furthermore, V th cannot easily be reduced below about 200 mV, because leakage currents due to increased oxide leakage (that is, assuming high-κ dielectrics are not available) and subthreshold conduction raise stand-by power consumption to unacceptable levels. (See the industry roadmap, which limits threshold to 200 mV, and Roy et al. ). Thus, according to this simplified list of factors, an increased I D,sat requires
589-536: Is different from Wikidata All article disambiguation pages All disambiguation pages Stack [REDACTED] Look up Stack or stack in Wiktionary, the free dictionary. Stack may refer to: Places [ edit ] Stack Island , an island game reserve in Bass Strait, south-eastern Australia, in Tasmania’s Hunter Island Group Blue Stack Mountains , in Co. Donegal, Ireland People [ edit ] Stack (surname) (including
620-403: Is different from Wikidata All article disambiguation pages All disambiguation pages High-%CE%BA Sometimes these materials are called "high-k" (pronounced "high kay"), instead of "high-κ" (high kappa). Silicon dioxide ( SiO 2 ) has been used as a gate oxide material for decades. As metal–oxide–semiconductor field-effect transistors (MOSFETs) have decreased in size,
651-404: Is expected that defect states in the high-κ dielectric can influence its electrical properties. Defect states can be measured for example by using zero-bias thermally stimulated current, zero-temperature-gradient zero-bias thermally stimulated current spectroscopy , or inelastic electron tunneling spectroscopy (IETS). Industry has employed oxynitride gate dielectrics since the 1990s, wherein
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#1732772754151682-487: Is to alter κ by replacing silicon dioxide with a high-κ material. In such a scenario, a thicker gate oxide layer might be used which can reduce the leakage current flowing through the structure as well as improving the gate dielectric reliability . The drain current I D for a MOSFET can be written (using the gradual channel approximation) as where The term V G − V th is limited in range due to reliability and room temperature operation constraints, since
713-603: The deployment of hafnium -based high-κ dielectrics in conjunction with a metallic gate for components built on 45 nanometer technologies, and has shipped it in the 2007 processor series codenamed Penryn . At the same time, IBM announced plans to transition to high-κ materials, also hafnium-based, for some products in 2008. While not identified, the most likely dielectric used in such applications are some form of nitrided hafnium silicates ( HfSiON ). HfO 2 and HfSiO are susceptible to crystallization during dopant activation annealing. NEC Electronics has also announced
744-504: The industrial terminology for an industrial plant chimney Funnel (ship) , the smokestack or chimney on a ship Stack effect , the movement of air into and out of buildings, chimneys, flue-gas stacks, or other containers See also [ edit ] All pages with titles beginning with Stack All pages with titles containing Stack Haystack (disambiguation) Stacker (disambiguation) Stacking (disambiguation) Stak (disambiguation) Topics referred to by
775-504: The industrial terminology for an industrial plant chimney Funnel (ship) , the smokestack or chimney on a ship Stack effect , the movement of air into and out of buildings, chimneys, flue-gas stacks, or other containers See also [ edit ] All pages with titles beginning with Stack All pages with titles containing Stack Haystack (disambiguation) Stacker (disambiguation) Stacking (disambiguation) Stak (disambiguation) Topics referred to by
806-407: The same term [REDACTED] This disambiguation page lists articles associated with the title Stack . If an internal link led you here, you may wish to change the link to point directly to the intended article. Retrieved from " https://en.wikipedia.org/w/index.php?title=Stack&oldid=1201575986 " Category : Disambiguation pages Hidden categories: Short description
837-407: The same term [REDACTED] This disambiguation page lists articles associated with the title Stack . If an internal link led you here, you may wish to change the link to point directly to the intended article. Retrieved from " https://en.wikipedia.org/w/index.php?title=Stack&oldid=1201575986 " Category : Disambiguation pages Hidden categories: Short description
868-427: The sea Stack (mathematics) , a sheaf that takes values in categories rather than sets Algebraic stack , a special kind of stack commonly used in algebraic geometry Stacks Project , an open source collaborative mathematics textbook writing project Stacking (chemistry) , or pi stacking, attractive, noncovalent interactions between aromatic rings Yellow stackhousia , a plant The stack (philosophy) ,
899-427: The sea Stack (mathematics) , a sheaf that takes values in categories rather than sets Algebraic stack , a special kind of stack commonly used in algebraic geometry Stacks Project , an open source collaborative mathematics textbook writing project Stacking (chemistry) , or pi stacking, attractive, noncovalent interactions between aromatic rings Yellow stackhousia , a plant The stack (philosophy) ,
930-419: The thickness of the silicon dioxide gate dielectric has steadily decreased to increase the gate capacitance (per unit area) and thereby drive current (per device width), raising device performance. As the thickness scales below 2 nm , leakage currents due to tunneling increase drastically, leading to high power consumption and reduced device reliability. Replacing the silicon dioxide gate dielectric with
961-434: The use of a HfSiON dielectric in their 55 nm UltimateLowPower technology. However, even HfSiON is susceptible to trap-related leakage currents, which tend to increase with stress over device lifetime. This leakage effect becomes more severe as hafnium concentration increases. There is no guarantee, however, that hafnium will serve as a de facto basis for future high-κ dielectrics. The 2006 ITRS roadmap predicted