Electron-beam-induced deposition (EBID) is a process of decomposing gaseous molecules by an electron beam leading to deposition of non-volatile fragments onto a nearby substrate. The electron beam is usually provided by a scanning electron microscope , which results in high spatial accuracy (potentially below one nanometer) and the possibility to produce free-standing, three-dimensional structures.
28-514: (Redirected from Depositions ) [REDACTED] Look up Deposition , deposition , or depose in Wiktionary, the free dictionary. Deposition may refer to: Deposition (law) , taking testimony outside of court Deposition (politics) , the removal of a person of authority from political power Deposition (university) , a widespread initiation ritual for new students practiced from
56-538: A 1528 oil painting Deposition from the Cross , Volterra (Rosso Fiorentino) The Deposition (Raphael) , a 1507 oil painting The Deposition (Rubens) , a 1602 painting by Peter Paul Rubens (previously attributed to van Dyck) now in the Galleria Borghese Deposition (Rogier van der Weyden) or The Descent from the Cross , an oil painting, c.1435 Deposition (van Dyck, 1615) ,
84-465: A 1545 oil painting The Deposition (Michelangelo) , a 1547–55 marble sculpture The Deposition from the Cross (Pontormo) , a 1528 oil painting Deposition from the Cross , Volterra (Rosso Fiorentino) The Deposition (Raphael) , a 1507 oil painting The Deposition (Rubens) , a 1602 painting by Peter Paul Rubens (previously attributed to van Dyck) now in the Galleria Borghese Deposition (Rogier van der Weyden) or The Descent from
112-839: A 1615 painting by Anthony van Dyck, now in the Alte Pinakothek in Munich Deposition (van Dyck, 1618) , a 1618–20 painting, now in the Kunsthistorisches Museum in Vienna Deposition (van Dyck, 1619) , a c. 1619 painting, now in the Ashmolean Museum Deposition (van Dyck, 1629) , a c. 1629 painting, now in the Royal Museum of Fine Arts Antwerp Deposition (van Dyck, 1629–30) or Lamentation over
140-418: A cathode target Chemical vapor deposition , a chemical process used in the semiconductor industry to produce thin films Electron beam-induced deposition , a process of decomposing gaseous molecules by an electron beam Electrospark deposition , a micro-welding manufacturing process typically used to repair damage to mechanical components Electrophoretic deposition Ion beam-assisted deposition ,
168-418: A cathode target Chemical vapor deposition , a chemical process used in the semiconductor industry to produce thin films Electron beam-induced deposition , a process of decomposing gaseous molecules by an electron beam Electrospark deposition , a micro-welding manufacturing process typically used to repair damage to mechanical components Electrophoretic deposition Ion beam-assisted deposition ,
196-457: A combination of ion implantation with a physical vapor deposition technique Molecular vapor deposition , the gas-phase reaction between surface reactive chemicals and an appropriately receptive surface Nanoparticle deposition , the process of attaching nanoparticles to solid surfaces called substrates to create coatings of nanoparticles Particle deposition , the spontaneous attachment of particles to surfaces Physical vapor deposition ,
224-457: A combination of ion implantation with a physical vapor deposition technique Molecular vapor deposition , the gas-phase reaction between surface reactive chemicals and an appropriately receptive surface Nanoparticle deposition , the process of attaching nanoparticles to solid surfaces called substrates to create coatings of nanoparticles Particle deposition , the spontaneous attachment of particles to surfaces Physical vapor deposition ,
252-474: A person of authority from political power Deposition (university) , a widespread initiation ritual for new students practiced from the Middle Ages until the 18th century Art [ edit ] Deposition from the Cross , the depiction of the removal of Jesus from the cross Deposition (Bellini) , a 1515–16 painting by Giovanni Bellini and his workshop Deposition of Christ (Bronzino) ,
280-423: A solution Deposition (geology) , material such as sediment being added to a landform Deposition (phase transition) , the process by which a gas is transformed into a solid Deposition (aerosol physics) , a process where aerosol particles set down onto surfaces Technology [ edit ] Cathodic arc deposition , a physical vapor deposition technique using an electric arc to vaporize material from
308-423: A solution Deposition (geology) , material such as sediment being added to a landform Deposition (phase transition) , the process by which a gas is transformed into a solid Deposition (aerosol physics) , a process where aerosol particles set down onto surfaces Technology [ edit ] Cathodic arc deposition , a physical vapor deposition technique using an electric arc to vaporize material from
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#1732772495681336-499: A variety of vacuum deposition methods used to produce thin films and coatings Pulsed laser deposition , a physical vapor deposition technique using a high-power pulsed laser beam in a vacuum chamber Other uses [ edit ] Defrocking or deposition, the opposite of ordination in many Christian churches "Depositions" ( Superstore ) , an episode of the TV series Superstore "The Deposition" ( The Office ) , an episode of
364-451: A variety of vacuum deposition methods used to produce thin films and coatings Pulsed laser deposition , a physical vapor deposition technique using a high-power pulsed laser beam in a vacuum chamber Other uses [ edit ] Defrocking or deposition, the opposite of ordination in many Christian churches "Depositions" ( Superstore ) , an episode of the TV series Superstore "The Deposition" ( The Office ) , an episode of
392-405: Is different from Wikidata All article disambiguation pages All disambiguation pages Deposition [REDACTED] Look up Deposition , deposition , or depose in Wiktionary, the free dictionary. Deposition may refer to: Deposition (law) , taking testimony outside of court Deposition (politics) , the removal of
420-567: Is different from Wikidata All article disambiguation pages All disambiguation pages Electron beam-induced deposition The focused electron beam of a scanning electron microscope (SEM) or scanning transmission electron microscope (STEM) is commonly used. Another method is ion-beam-induced deposition (IBID), where a focused ion beam is applied instead. Precursor materials are typically liquid or solid and gasified prior to deposition, usually through vaporization or sublimation , and introduced, at accurately controlled rate, into
448-619: Is in the order of 10 nm/s. Primary electron energies in SEMs or STEMs are usually between 10 and 300 keV, where reactions induced by electron impact, i.e. precursor dissociation, have a relatively low cross section. The majority of decomposition occurs via low energy electron impact: either by low energy secondary electrons, which cross the substrate-vacuum interface and contribute to the total current density, or inelastically scattered (backscattered) electrons. Primary S(T)EM electrons can be focused into spots as small as ~0.045 nm. While
476-449: Is very similar to EBID with the major difference that focused ion beam , usually 30 keV Ga , is used instead of the electron beam. In both techniques, it is not the primary beam, but secondary electrons which cause the deposition. IBID has the following disadvantages as compared to EBID: The advantages of IBID are: Nanostructures of virtually any 3-dimensional shape can be deposited using computer-controlled scanning of electron beam. Only
504-491: The Cross , an oil painting, c.1435 Deposition (van Dyck, 1615) , a 1615 painting by Anthony van Dyck, now in the Alte Pinakothek in Munich Deposition (van Dyck, 1618) , a 1618–20 painting, now in the Kunsthistorisches Museum in Vienna Deposition (van Dyck, 1619) , a c. 1619 painting, now in the Ashmolean Museum Deposition (van Dyck, 1629) , a c. 1629 painting, now in the Royal Museum of Fine Arts Antwerp Deposition (van Dyck, 1629–30) or Lamentation over
532-535: The Dead Christ , lost 1945 Deposition (van Dyck, 1634) , a 1634 painting, now in the Alte Pinakothek in Munich Deposition (van Dyck, 1635) , a 1635 painting, now in the now in the Royal Museum of Fine Arts Antwerp Deposition (van Dyck, 1640) , a 1634–40 painting, now in the Valdes Izaguirre collection Science [ edit ] Deposition (chemistry) , molecules settling out of
560-408: The Dead Christ , lost 1945 Deposition (van Dyck, 1634) , a 1634 painting, now in the Alte Pinakothek in Munich Deposition (van Dyck, 1635) , a 1635 painting, now in the now in the Royal Museum of Fine Arts Antwerp Deposition (van Dyck, 1640) , a 1634–40 painting, now in the Valdes Izaguirre collection Science [ edit ] Deposition (chemistry) , molecules settling out of
588-412: The Middle Ages until the 18th century Art [ edit ] Deposition from the Cross , the depiction of the removal of Jesus from the cross Deposition (Bellini) , a 1515–16 painting by Giovanni Bellini and his workshop Deposition of Christ (Bronzino) , a 1545 oil painting The Deposition (Michelangelo) , a 1547–55 marble sculpture The Deposition from the Cross (Pontormo) ,
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#1732772495681616-558: The TV series The Office See also [ edit ] Depo (disambiguation) Deposit (disambiguation) Topics referred to by the same term [REDACTED] This disambiguation page lists articles associated with the title Deposition . If an internal link led you here, you may wish to change the link to point directly to the intended article. Retrieved from " https://en.wikipedia.org/w/index.php?title=Deposition&oldid=1242617976 " Category : Disambiguation pages Hidden categories: Short description
644-558: The TV series The Office See also [ edit ] Depo (disambiguation) Deposit (disambiguation) Topics referred to by the same term [REDACTED] This disambiguation page lists articles associated with the title Deposition . If an internal link led you here, you may wish to change the link to point directly to the intended article. Retrieved from " https://en.wikipedia.org/w/index.php?title=Deposition&oldid=1242617976 " Category : Disambiguation pages Hidden categories: Short description
672-422: The high-vacuum chamber of the electron microscope. Alternatively, solid precursors can be sublimated by the electron beam itself. When deposition occurs at a high temperature or involves corrosive gases, a specially designed deposition chamber is used; it is isolated from the microscope, and the beam is introduced into it through a micrometre-sized orifice. The small orifice size maintains differential pressure in
700-485: The microscope (vacuum) and deposition chamber (no vacuum). Such deposition mode has been used for EBID of diamond. In the presence of the precursor gas, the electron beam is scanned over the substrate, resulting in deposition of material. The scanning is usually computer-controlled. The deposition rate depends on a variety of processing parameters, such as the partial precursor pressure, substrate temperature, electron beam parameters, applied current density, etc. It usually
728-465: The point of impact of the electron beam (depending on its energy), material deposition is not necessarily confined to the irradiated spot. To overcome this problem, compensation algorithms can be applied, which is typical for electron beam lithography. As of 2008 the range of materials deposited by EBID included Al, Au, amorphous carbon, diamond, Co, Cr, Cu, Fe, GaAs, GaN, Ge, Mo, Nb, Ni, Os, Pd, Pt, Rh, Ru, Re, Si, Si 3 N 4 , SiO x , TiO x , W, and
756-437: The smallest structures deposited so far by EBID are point deposits of ~0.7 nm diameter, deposits usually have a larger lateral size than the beam spot size. The reason are the so-called proximity effects, meaning that secondary, backscattered and forward scattered (if the beam dwells on already deposited material) electrons contribute to the deposition. As these electrons can leave the substrate up to several microns away from
784-731: Was being expanded. The limiting factor is the availability of appropriate precursors, gaseous or having a low sublimation temperature. The most popular precursors for deposition of elemental solids are metal carbonyls of Me(CO) x structure or metallocenes . They are easily available, however, due to incorporation of carbon atoms from the CO ligands, deposits often exhibit a low metal content. Metal-halogen complexes ( WF 6 , etc.) result in cleaner deposition, but are more difficult to handle as they are toxic and corrosive. Compound materials are deposited from specially crafted, exotic gases, e.g. D 2 GaN 3 for GaN. Ion-beam-induced deposition (IBID)
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